三维多值非挥发存储器及其制备方法
霍宗亮; 朱晨昕; 龙世兵; 谢常青; 刘明; 王琴; 闫锋
2014-04-22
著作权人中国科学院微电子研究所
专利号US8705274
国家美国
文献子类发明专利
英文摘要

The present disclosure relates to the field of microelectronics manufacture and memories. A three-dimensional multi-bit non-volatile memory and a method for manufacturing the same are disclosed. The memory comprises a plurality of memory cells constituting a memory array. The memory array may comprise: a gate stack structure; periodically and alternately arranged gate stack regions and channel region spaces; gate dielectric layers for discrete charge storage; periodically arranged channel regions; source doping regions and drain doping regions symmetrically arranged to each other; bit lines led from the source doping regions and the drain doping regions; and word lines led from the gate stack regions. The gate dielectric layers for discrete charge storage can provide physical storage spots to achieve single-bit or multi-bit operations, so as to achieve a high storage density. According to the present disclosure, the localized charge storage characteristic of the charge trapping layer and characteristics such as a longer effective channel length and a higher density of a vertical memory structure are utilized, to provide multiple storage spots in a single memory cell. Therefore, the storage density is improved while good performances such as high speed are ensured.

公开日期2012-01-05
申请日期2011-06-30
语种中文
内容类型专利
源URL[http://10.10.10.126/handle/311049/10389]  
专题微电子研究所_微电子器件与集成技术重点实验室
作者单位中国科学院微电子研究所
推荐引用方式
GB/T 7714
霍宗亮,朱晨昕,龙世兵,等. 三维多值非挥发存储器及其制备方法. US8705274. 2014-04-22.
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