DEPOSITION OF GALLIUM OXIDE AND INDIUM OXIDE ON GAAS FOR IN-SITU PROCESS USE BY ALTERNATING SUPPLY OF TEGA, TMIN, AND H2O2 AS SURGE PULSES | |
OZASA, K; YE, TC; AOYAGI, Y | |
1994 | |
内容类型 | 外文期刊 |
源URL | [http://10.10.10.126/handle/311049/8822] ![]() |
专题 | 微电子研究所_回溯数据库(1992-2008年) |
推荐引用方式 GB/T 7714 | OZASA, K,YE, TC,AOYAGI, Y. DEPOSITION OF GALLIUM OXIDE AND INDIUM OXIDE ON GAAS FOR IN-SITU PROCESS USE BY ALTERNATING SUPPLY OF TEGA, TMIN, AND H2O2 AS SURGE PULSES. 1994. |
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