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Dielectronic recombination of Pd-like gadolinium
Li, B. W.1; O'Sullivan, G.1; Fu, Y. B.2,3,4; Dong, C. Z.2,3,4
刊名PHYSICAL REVIEW A
2012-01-30
卷号85
ISSN号1050-2947
DOI10.1103/PhysRevA.85.012712
英文摘要As research and development of extreme ultraviolet lithography (EUVL) sources at 6.7 nm (which will be based on emission from ionized gadolinium) has already begun, reliable atomic data are required in order to determine the optimum plasma conditions. However, the complexity of the atomic structure means that ab initio level-resolved dielectronic recombination (DR) calculations are currently unavailable for the ions of interest. Here we report the first detailed calculation of the DR rate coefficients for the ground state and first excited states of Pd-like gadolinium. Energy levels, radiative transition probabilities, and autoionization rates of Ag-like gadolinium for [Kr]4d(9)4fnl, [Kr]4p(5)4d(10)4fnl, [Kr]4d(9)5l'nl, and [Kr]4d(9)6l'nl (n <= 18) complexes were calculated using the flexible atomic code (FAC). It was found that inclusion of 4p(5)4d(10)4fnl configurations has significant influence on the total DR rate coefficient. The DR rate coefficients obtained here are compared with radiative recombination and three-body recombination coeffcients. The results show that the DR rate coefficient is almost an order of magnitude higher than the coefficients for the other two recombination processes combined at plasma electron temperatures around 110 eV, which suggests that the DR process should be included in theoretical modeling for Pd-like gadolinium in EUVL source plasmas.
资助项目Science Foundation Ireland[07/IN.1/I1771]
WOS关键词LASER-PRODUCED PLASMAS ; LITHOGRAPHY ; SPECTRA ; NI
WOS研究方向Optics ; Physics
语种英语
出版者AMER PHYSICAL SOC
WOS记录号WOS:000299842200007
内容类型期刊论文
源URL[http://119.78.100.186/handle/113462/56824]  
专题中国科学院近代物理研究所
通讯作者Li, B. W.
作者单位1.Univ Coll Dublin, Sch Phys, Dublin 4, Ireland
2.NW Normal Univ, Coll Phys & Elect Engn, Key Lab Atom & Mol Phys & Funct Mat Gansu Prov, Lanzhou 730070, Peoples R China
3.NWNU, Joint Lab Atom & Mol Phys, Lanzhou 730070, Peoples R China
4.IMP CAS, Lanzhou 730070, Peoples R China
推荐引用方式
GB/T 7714
Li, B. W.,O'Sullivan, G.,Fu, Y. B.,et al. Dielectronic recombination of Pd-like gadolinium[J]. PHYSICAL REVIEW A,2012,85.
APA Li, B. W.,O'Sullivan, G.,Fu, Y. B.,&Dong, C. Z..(2012).Dielectronic recombination of Pd-like gadolinium.PHYSICAL REVIEW A,85.
MLA Li, B. W.,et al."Dielectronic recombination of Pd-like gadolinium".PHYSICAL REVIEW A 85(2012).
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