Dielectronic recombination of Pd-like gadolinium | |
Li, B. W.1; O'Sullivan, G.1; Fu, Y. B.2,3,4; Dong, C. Z.2,3,4 | |
刊名 | PHYSICAL REVIEW A
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2012-01-30 | |
卷号 | 85 |
ISSN号 | 1050-2947 |
DOI | 10.1103/PhysRevA.85.012712 |
英文摘要 | As research and development of extreme ultraviolet lithography (EUVL) sources at 6.7 nm (which will be based on emission from ionized gadolinium) has already begun, reliable atomic data are required in order to determine the optimum plasma conditions. However, the complexity of the atomic structure means that ab initio level-resolved dielectronic recombination (DR) calculations are currently unavailable for the ions of interest. Here we report the first detailed calculation of the DR rate coefficients for the ground state and first excited states of Pd-like gadolinium. Energy levels, radiative transition probabilities, and autoionization rates of Ag-like gadolinium for [Kr]4d(9)4fnl, [Kr]4p(5)4d(10)4fnl, [Kr]4d(9)5l'nl, and [Kr]4d(9)6l'nl (n <= 18) complexes were calculated using the flexible atomic code (FAC). It was found that inclusion of 4p(5)4d(10)4fnl configurations has significant influence on the total DR rate coefficient. The DR rate coefficients obtained here are compared with radiative recombination and three-body recombination coeffcients. The results show that the DR rate coefficient is almost an order of magnitude higher than the coefficients for the other two recombination processes combined at plasma electron temperatures around 110 eV, which suggests that the DR process should be included in theoretical modeling for Pd-like gadolinium in EUVL source plasmas. |
资助项目 | Science Foundation Ireland[07/IN.1/I1771] |
WOS关键词 | LASER-PRODUCED PLASMAS ; LITHOGRAPHY ; SPECTRA ; NI |
WOS研究方向 | Optics ; Physics |
语种 | 英语 |
出版者 | AMER PHYSICAL SOC |
WOS记录号 | WOS:000299842200007 |
内容类型 | 期刊论文 |
源URL | [http://119.78.100.186/handle/113462/56824] ![]() |
专题 | 中国科学院近代物理研究所 |
通讯作者 | Li, B. W. |
作者单位 | 1.Univ Coll Dublin, Sch Phys, Dublin 4, Ireland 2.NW Normal Univ, Coll Phys & Elect Engn, Key Lab Atom & Mol Phys & Funct Mat Gansu Prov, Lanzhou 730070, Peoples R China 3.NWNU, Joint Lab Atom & Mol Phys, Lanzhou 730070, Peoples R China 4.IMP CAS, Lanzhou 730070, Peoples R China |
推荐引用方式 GB/T 7714 | Li, B. W.,O'Sullivan, G.,Fu, Y. B.,et al. Dielectronic recombination of Pd-like gadolinium[J]. PHYSICAL REVIEW A,2012,85. |
APA | Li, B. W.,O'Sullivan, G.,Fu, Y. B.,&Dong, C. Z..(2012).Dielectronic recombination of Pd-like gadolinium.PHYSICAL REVIEW A,85. |
MLA | Li, B. W.,et al."Dielectronic recombination of Pd-like gadolinium".PHYSICAL REVIEW A 85(2012). |
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