Deuterium Retention in the Co-Deposition Carbon Layers Deposited by Radio-Frequency Magnetron Sputtering in D-2 Atmosphere

doi:10.1088/0256-307X/31/5/052901

	Deuterium Retention in the Co-Deposition Carbon Layers Deposited by Radio-Frequency Magnetron Sputtering in D-2 Atmosphere
	Zhang Wei-Yuan 1,2; Shi Li-Qun 1,2; Zhang Bin 1,2; Hu Jian-Sheng 3
刊名	CHINESE PHYSICS LETTERS
	2014-05-01
卷号	31
ISSN号	0256-307X
DOI	10.1088/0256-307X/31/5/052901
文献子类	Article
英文摘要	Carbon is deposited on C and Si substrates by rf magnetron plasma sputtering in a D-2 atmosphere. The deposited layers are examined with ion beam analysis and thermal desorption spectroscopy (TDS). The growth rates of the layers deposited on Si decrease with increasing substrate temperature, while increase significantly with the increase of D-2 pressure. Meanwhile, the deuterium concentrations in the layers deposited on the Si substrates decrease from 30% to 2% and from 31% to 1% on the C substrates, respectively, when the substrate temperature varies from 350K to 900 K. Similarly, the D concentration in the layer on the Si substrates increases from 3.4% to 47%, and from 8% to 35% on the C substrates when the D-2 pressure increases from 0.3Pa to 8.0Pa. D desorption characterized by TDS is mainly in the forms of D-2, HD, HDO, CD4, and C2D4, and a similar release peak occurs at 645 K. The release peak of D-2 molecules at 960K can be attributed to the escaped gas from the thin co-deposited deuterium-rich carbon layer in the form of C-D bonding.
WOS关键词	PLASMA-FACING COMPONENTS ; C-H FILMS ; ISOTOPE RETENTION ; ASDEX UPGRADE ; HYDROGEN ; DIVERTOR ; TUNGSTEN ; HELIUM ; ITER ; TRITIUM
语种	英语
出版者	IOP PUBLISHING LTD
WOS记录号	WOS:000337500400011
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/49911]
专题	中国科学院近代物理研究所
通讯作者	Shi Li-Qun
作者单位	1.Fudan Univ, Inst Modern Phys, Appl Ion Beam Phys Lab, Shanghai 200433, Peoples R China 2.Fudan Univ, Dept Nucl Sci & Technol, Shanghai 200433, Peoples R China 3.Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Peoples R China
推荐引用方式 GB/T 7714	Zhang Wei-Yuan,Shi Li-Qun,Zhang Bin,et al. Deuterium Retention in the Co-Deposition Carbon Layers Deposited by Radio-Frequency Magnetron Sputtering in D-2 Atmosphere[J]. CHINESE PHYSICS LETTERS,2014,31.
APA	Zhang Wei-Yuan,Shi Li-Qun,Zhang Bin,&Hu Jian-Sheng.(2014).Deuterium Retention in the Co-Deposition Carbon Layers Deposited by Radio-Frequency Magnetron Sputtering in D-2 Atmosphere.CHINESE PHYSICS LETTERS,31.
MLA	Zhang Wei-Yuan,et al."Deuterium Retention in the Co-Deposition Carbon Layers Deposited by Radio-Frequency Magnetron Sputtering in D-2 Atmosphere".CHINESE PHYSICS LETTERS 31(2014).