Structure and deuterium retention properties of tungsten layers deposited by plasma sputtering in a mixed atmosphere of D-2 and He | |
Tang, X. H.1,2; Shi, L. Q.1,2; O'Connor, D. J.3; King, B.3 | |
刊名 | JOURNAL OF NUCLEAR MATERIALS |
2014-03-01 | |
卷号 | 446页码:200-207 |
ISSN号 | 0022-3115 |
DOI | 10.1016/j.jnucmat.2013.12.008 |
文献子类 | Article |
英文摘要 | The influence of the deposition conditions on the surface morphology, crystal structure and deuterium retention of the tungsten layers formed by rf magnetron plasma sputtering in mixed atmosphere of D-2, He and Ar, has been carried out. Helium containing deuterated tungsten layers (named He-WDx) on Cu/Si substrate demonstrate serious film damages with zones of cracks, fractures, flaking-off and large surface blisters. However, these kinds of damages do not happen on the He-WDx layers performed on mechanically polished polycrystalline Cu substrates because of larger surface roughness of the substrates. The crystal structure of the W layer greatly changes with the additional He in the layer, and large amounts of defects resulting in lattice expansion and X-diffraction peak broadening were produced in the W crystal. He in the W layer has direct impacts on D retention. Both D and He concentrations vary simultaneously with He fraction, attached negative bias and substrate temperature. Crown Copyright (C) 2013 Published by Elsevier B.V. All rights reserved. |
WOS关键词 | HELIUM ; HYDROGEN ; COMPONENTS ; DAMAGE ; IONS |
语种 | 英语 |
出版者 | ELSEVIER SCIENCE BV |
WOS记录号 | WOS:000331662400027 |
内容类型 | 期刊论文 |
源URL | [http://119.78.100.186/handle/113462/49703] |
专题 | 中国科学院近代物理研究所 |
通讯作者 | Shi, L. Q. |
作者单位 | 1.Fudan Univ, Inst Modern Phys, Appl Ion Beam Phys Lab, Shanghai 200433, Peoples R China 2.Fudan Univ, Dept Nucl Sci & Technol, Shanghai 200433, Peoples R China 3.Univ Newcastle, Sch Math & Phys Sci, Callaghan, NSW 2308, Australia |
推荐引用方式 GB/T 7714 | Tang, X. H.,Shi, L. Q.,O'Connor, D. J.,et al. Structure and deuterium retention properties of tungsten layers deposited by plasma sputtering in a mixed atmosphere of D-2 and He[J]. JOURNAL OF NUCLEAR MATERIALS,2014,446:200-207. |
APA | Tang, X. H.,Shi, L. Q.,O'Connor, D. J.,&King, B..(2014).Structure and deuterium retention properties of tungsten layers deposited by plasma sputtering in a mixed atmosphere of D-2 and He.JOURNAL OF NUCLEAR MATERIALS,446,200-207. |
MLA | Tang, X. H.,et al."Structure and deuterium retention properties of tungsten layers deposited by plasma sputtering in a mixed atmosphere of D-2 and He".JOURNAL OF NUCLEAR MATERIALS 446(2014):200-207. |
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