| Crystal quality improvement of sputtered AlN film on sapphire substrate by high-temperature annealing | |
| Lu Zhao ; Kun Yang Yujie Ai ; Lian Zhang ; Xiaolong Niu Hongrui Lv ; Yun Zhang | |
| 刊名 | Journal of Materials Science: Materials in Electronics
 |
| 2018 | |
| 卷号 | 29期号:16页码:13766-13773 |
| 内容类型 | 期刊论文 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/29264]  |
| 专题 | 半导体研究所_固态光电信息技术实验室 |
| 推荐引用方式 GB/T 7714 | Lu Zhao ; Kun Yang Yujie Ai ; Lian Zhang ; Xiaolong Niu Hongrui Lv ; Yun Zhang. Crystal quality improvement of sputtered AlN film on sapphire substrate by high-temperature annealing[J]. Journal of Materials Science: Materials in Electronics,2018,29(16):13766-13773. |
| APA | Lu Zhao ; Kun Yang Yujie Ai ; Lian Zhang ; Xiaolong Niu Hongrui Lv ; Yun Zhang.(2018).Crystal quality improvement of sputtered AlN film on sapphire substrate by high-temperature annealing.Journal of Materials Science: Materials in Electronics,29(16),13766-13773. |
| MLA | Lu Zhao ; Kun Yang Yujie Ai ; Lian Zhang ; Xiaolong Niu Hongrui Lv ; Yun Zhang."Crystal quality improvement of sputtered AlN film on sapphire substrate by high-temperature annealing".Journal of Materials Science: Materials in Electronics 29.16(2018):13766-13773. |
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