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	A novel electrostatically driven bulk-micromachined on-off optical switch
	Wang, CS ; Fang, J ; Chang, S ; Yang, ZC ; Zhang, DC
	2001
关键词	SILICON SYSTEMS
英文摘要	In this paper, a novel bulk micromachined on-off optical switch is proposed with the techniques of silicon-glass wafer bonding and deep reactive ion etch. The micromechanical optical switch includes a slope anchor and a beam with a shutter, in which the beam is laterally driven by electrostatic actuator. It is important to design and optimize the slope anchor to produce large shutter displacement with low driving voltage. FEM simulation with ANSY 5.5 is made to analyze the dynamic behavior of the switch. Meanwhile, the pull-in voltage is achieved by using the solution of Intellisute 4.0, from that the frequency shift is obtained. The optimization offers a reasonable design for the optical switch array based on the present fabrication technology.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000174745900197&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter; CPCI-S(ISTP); 0
语种	英语
内容类型	会议论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/316652]
专题	工学院
推荐引用方式 GB/T 7714	Wang, CS,Fang, J,Chang, S,et al. A novel electrostatically driven bulk-micromachined on-off optical switch[C]. 见:.

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