Contact resonance force microscopy for nanomechanical characterization:   Accuracy and sensitivity

doi:10.1063/1.4817659

CORC > 北京大学 > 工学院

	Contact resonance force microscopy for nanomechanical characterization: Accuracy and sensitivity
	Zhou, Xilong ; Fu, Ji ; Li, Faxin
刊名	应用物理杂志
	2013
关键词	ACOUSTIC MICROSCOPY ELASTIC-MODULUS MECHANICAL-PROPERTIES SURFACE CANTILEVERS STIFFNESS FRICTION NANOINDENTATION INDENTATION AFM
DOI	10.1063/1.4817659
英文摘要	Contact Resonance Force Microscopy (CRFM), based on dynamic force microscopy, is a new promising technique for quantitative nanoscale mechanical characterization of various materials. In this work, we systematically investigated the measurement accuracy and sensitivity of CRFM both experimentally and numerically. For the accuracy study, we first evaluated the validity of the Euler-Bernoulli beam model used in CRFM and found that it is accurate enough for practical testing. Then, the influence of the tip location was also analyzed and results show that it can significantly affect the obtained indentation modulus. The measurement accuracy of CRFM was then compared with that of nanoindentation and it shows that CRFM has less relative testing errors than nanoindentation for modulus mapping but a larger data scattering for single-point measurements. As to the sensitivity study, we first conducted the cantilever-stiffness dependent sensitivity analysis using both numerical and experimental approaches, and suggested that a stiffer cantilever (say 30-50 N/m) is required for characterization of hard materials (say modulus larger than 30 GPa). Then, the sensitivity of different flexural modes of a specific cantilever was tested and it is found that higher flexural modes could provide higher sensitivity especially, when the normalized contact stiffness is large. Finally, the effect of laser spot location on the detecting sensitivity was tested and the optimal location is suggested. This work could provide very helpful guidance to nanoscale mechanical characterization using CRFM. (C) 2013 AIP Publishing LLC.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000323177100066&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Physics, Applied; SCI(E); EI; 8; ARTICLE; 6; 114
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/154440]
专题	工学院
推荐引用方式 GB/T 7714	Zhou, Xilong,Fu, Ji,Li, Faxin. Contact resonance force microscopy for nanomechanical characterization: Accuracy and sensitivity[J]. 应用物理杂志,2013.
APA	Zhou, Xilong,Fu, Ji,&Li, Faxin.(2013).Contact resonance force microscopy for nanomechanical characterization: Accuracy and sensitivity.应用物理杂志.
MLA	Zhou, Xilong,et al."Contact resonance force microscopy for nanomechanical characterization: Accuracy and sensitivity".应用物理杂志 (2013).