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	A NANOMACHINED TORQUE SENSOR WITH ULTRAHIGH SENSITIVITY
	Huang, Jian Guo ; Cai, Hong ; Gu, Yuan Deng ; Dong, Bin ; Song, Jun Feng ; Yang, Zhen Chuan ; Jin, Yu Feng ; Hao, Yu Long ; Wu, Jiu Hui ; Chen, Tian Ning ; Kwong, Dim-Lee ; Liu, Ai Qun
	2016
关键词	FORCE
英文摘要	This paper reports, for the first time, a novel nanoscale torque sensor in a split ring resonator. The mechanical resonator is embedded into ring resonator and separated by 200 nm from the substrate. By taking advantage of extreme sensitivity of ring resonator, the torque sensor achieves a displacement noise floor of 80 fm/Hz(0.5). This is corresponding to small torque as small as 0.17x-10(-18) N.m. Particularly, the platform can be used to investigate the dispersive and dissipative coupling in optomechanics for novel physical devices and opens new door for a wide range of physical measurements involving extremely small torques.; CPCI-S(ISTP); eaqliu@ntu.edu.sg; 858-861
语种	英语
出处	29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/457043]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Huang, Jian Guo,Cai, Hong,Gu, Yuan Deng,et al. A NANOMACHINED TORQUE SENSOR WITH ULTRAHIGH SENSITIVITY. 2016-01-01.

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