N+/P Shallow Junction with High Dopant Activation and Low Contact Resistivity Fabricated by Solid Phase Epitaxy Method for Ge Technology | |
Liu, Pengqiang ; Li, Ming ; An, Xia ; Lin, Meng ; Zhao, Yang ; Zhang, Bingxin ; Xia, Xuyuan ; Huang, Ru | |
2015 | |
英文摘要 | In this paper, solid phase epitaxy (SPE) process is proposed to improve phosphorous activation and hence reduce the contact resistivity of n(+)/p junction for Ge n-MOS technology. Over 1x10(20) cm(-3) electrical concentration and about 1.75x10(-6) ohm.cm(2) contact resistivity have been achieved at P+ implantation of 10keV and 5x10(14)cm(-2) and annealing condition of 600 degrees C, 10seconds. The fabricated N+/P diode shows 2 times higher forward current and well controlled leakage.; CPCI-S(ISTP); liming.ime@pku.edu.cn; anxia@ime.pku.edu.cn; ruhuang@pku.edu.cn |
语种 | 英语 |
出处 | Silicon Nanoelectronics Workshop |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/450343] ![]() |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Liu, Pengqiang,Li, Ming,An, Xia,et al. N+/P Shallow Junction with High Dopant Activation and Low Contact Resistivity Fabricated by Solid Phase Epitaxy Method for Ge Technology. 2015-01-01. |
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