STUDY OF PARYLENE PENETRATION INTO MICROCHANNEL | |
Wang, W. ; Kang, D. ; Tai, Y. C. | |
2015 | |
关键词 | Parylene penetration microchannel |
英文摘要 | This study reports the penetration properties of various Parylenes (i.e., C, N and HT) inside long microchannels. The work broadly covers the effects of the dimer type, loaded dimer mass, substrate temperature and channel size on the penetration length, i.e., the length that Parylene can be deposited into the microchannel from the inlet. Understanding the mechanism of Parylene penetration into microchannel helps to develop mass-producible inner surface protection design and process for microfluidic devices.; CPCI-S(ISTP); yctai@mems.caltech.edu; 1307-1310 |
语种 | 英语 |
出处 | 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/450294] ![]() |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Wang, W.,Kang, D.,Tai, Y. C.. STUDY OF PARYLENE PENETRATION INTO MICROCHANNEL. 2015-01-01. |
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