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	STUDY OF PARYLENE PENETRATION INTO MICROCHANNEL
	Wang, W. ; Kang, D. ; Tai, Y. C.
	2015
关键词	Parylene penetration microchannel
英文摘要	This study reports the penetration properties of various Parylenes (i.e., C, N and HT) inside long microchannels. The work broadly covers the effects of the dimer type, loaded dimer mass, substrate temperature and channel size on the penetration length, i.e., the length that Parylene can be deposited into the microchannel from the inlet. Understanding the mechanism of Parylene penetration into microchannel helps to develop mass-producible inner surface protection design and process for microfluidic devices.; CPCI-S(ISTP); yctai@mems.caltech.edu; 1307-1310
语种	英语
出处	18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/450294]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang, W.,Kang, D.,Tai, Y. C.. STUDY OF PARYLENE PENETRATION INTO MICROCHANNEL. 2015-01-01.

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