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	A Novel MEMS Chip-based Atmospheric Electric Field Sensor for Lightning Hazard Warning Applications
	Yang, Pengfei ; Chen, Bo ; Wen, Xiaolong ; Peng, Chunrong ; Xia, Shanhong ; Hao, Yilong
	2015
关键词	MEMS atmospheric electric field sensor the minimum detectable electric field lightning hazard warning
英文摘要	This paper presents a novel atmospheric electric field sensor based on high sensitivity resonant MEMS (microelectromechanical systems) electric field sense chips, which resolves the problems of motor wear, high power consumption and failure rate of the conventional electric field mill. The chip was fabricated in a commercial SOIMUMPS process. The sensor overall structure scheme was proposed and the phase-sensitive detection method was used for extract the chip output signal. A special protective structure was designed for protecting the sensor against the influences of the external environment. The minimum detectable electric field of the sensor is 10V/m with an uncertainty of 0.67% in the range of 0 similar to 50kV/m, and its power consumption is only 0.62w. The outdoor test showed that the plotted data of the sensor agreed well with those of the conventional electric field mill on both sunny day and thunderstorm day, which indicates that the developed sensor can meet the applications of lighting hazard warning.; CPCI-S(ISTP); yang330650591@126.com; 398-401
语种	英语
出处	2015 IEEE SENSORS
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/450177]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yang, Pengfei,Chen, Bo,Wen, Xiaolong,et al. A Novel MEMS Chip-based Atmospheric Electric Field Sensor for Lightning Hazard Warning Applications. 2015-01-01.

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