Electrowetting display pixels fabricated by nanoimprint lithography | |
Di, Q. T. ; Zhang, H. ; Liang, X. L. ; Li, A. D. ; Xiao, C. S. ; Wu, D. ; Xu, Q. Y. | |
2015 | |
关键词 | Electrowetting displays nanoimprint lithography RIE SU-8 MOLD |
英文摘要 | Electrowetting displays (EWD) is a novel technology, based on the variation in coverage of a colored oil film in pixels via application of an electrostatic force. These pixels are usually fabricated by photolithography, which seriously limits materials selection and large area fabrication. In this paper, we demonstrate the feasibility of a novel method, nanoimprint lithography (NIL), to fabricate EWD pixels. Controllable contraction and recovery of oil film in single EWD pixels was realized. Compared with conventional lithography, NIL provides a cost-and time-saving technique that generates comparable display properties and is able to be easily extended to the mass production.; CPCI-S(ISTP); diwu@nju.edu.cn; xuqingyu@seu.edu.cn; 495-501; 12 |
语种 | 中文 |
出处 | PROCEEDINGS OF THE 2015 INTERNATIONAL CONFERENCE ON APPLIED SCIENCE AND ENGINEERING INNOVATION |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/446331] |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Di, Q. T.,Zhang, H.,Liang, X. L.,et al. Electrowetting display pixels fabricated by nanoimprint lithography. 2015-01-01. |
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