QQ客服 官方微博 反馈留言

	A monolithic integration multifunctional MEMS sensor based on cavity SOI wafer
	Zhang, Yangxi ; Yang, Chenchen ; Meng, Fanrui ; Liu, Guandong ; Gao, Chengchen ; Hao, Yilong
	2014
英文摘要	This paper reports a monolithic integration multifunctional MEMS sensor for acceleration and pressure measurement based on cavity SOI wafer. The piezoresistive sensor uses a beam-block-membrane structure which is not only sensitive to acceleration, but also can be used as a gauge pressure transducer to detect low pressure. A miniature absolute pressure sensor is embedded to the accelerometer's mass block without increasing in chip area. This gapless sensor is designed for dust environment. The fabrication process allows thin membrane design to achieve high sensitivity in small chip size. The measure range of the accelerometer can be adjusted by controlling etching depth in manufacturing process after layout design and CMOS process. A 100g measurement range accelerometer which can be used as a 5kPa gauge pressure transducer and an 180??m??180??m 500kPa absolute pressure sensor are integrated in a 1.7mm??1.7mm die for tire pressure monitoring system and fabricated in 6 inch production line. The actual device shows the sensitivity of 0.164mV/g/V to acceleration and 0.0524mV/kPa/V to absolute pressure in 3.3V supply voltage. ? 2014 IEEE.; EI; December; 1952-1955; 2014-December
语种	英语
出处	13th IEEE SENSORS Conference, SENSORS 2014
DOI标识	10.1109/ICSENS.2014.6985414
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/423936]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, Yangxi,Yang, Chenchen,Meng, Fanrui,et al. A monolithic integration multifunctional MEMS sensor based on cavity SOI wafer. 2014-01-01.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。