Flexible nickel-doped zinc oxide thin-film transistors fabricated on   plastic substrates at low temperature

doi:10.7567/JJAP.54.04DJ07

CORC > 北京大学 > 信息科学技术学院

	Flexible nickel-doped zinc oxide thin-film transistors fabricated on plastic substrates at low temperature
	Huang, Lingling ; Han, Dedong ; Chen, Zhuofa ; Cong, Yingying ; Wu, Jing ; Zhao, Nannan ; Dong, Junchen ; Zhao, Feilong ; Liu, Lifeng ; Zhang, Shengdong ; Zhang, Xing ; Wang, Yi
刊名	JAPANESE JOURNAL OF APPLIED PHYSICS
	2015
关键词	ROOM-TEMPERATURE SEMICONDUCTORS
DOI	10.7567/JJAP.54.04DJ07
英文摘要	High-performance nickel (Ni)-doped zinc oxide thin-film transistors (NZO TFTs) have been successfully fabricated on transparent flexible plastic substrates at a low temperature. The effect of different oxygen partial pressures during channel deposition on the electrical properties of NZO TFTs was studied to improve the device performance. We found that the oxygen partial pressure during channel deposition has a significant influence on the performance of NZO TFTs. Finally, it was demonstrated that a NZO film with 100% Ar sputtering gas during channel deposition exhibited the best electrical properties, with a drain current on/off ratio of 10(8), a positive threshold voltage of 2.59 V, a subthreshold swing of 233 mV/decade, and a saturation mobility of 118.9 cm(2).V-1.s(-1). The results show that Ni-doped ZnO is a promising candidate for flexible fully transparent displays. (C) 2015 The Japan Society of Applied Physics; National Basic Research Program of China (973 program) [2011CBA00600]; National Natural Science Foundation of China [61275025]; SCI(E); EI; ARTICLE; handedong@pku.edu.cn; wangyi@ime.pku.edu.cn; 4,SI; 54
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/420558]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Huang, Lingling,Han, Dedong,Chen, Zhuofa,et al. Flexible nickel-doped zinc oxide thin-film transistors fabricated on plastic substrates at low temperature[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2015.
APA	Huang, Lingling.,Han, Dedong.,Chen, Zhuofa.,Cong, Yingying.,Wu, Jing.,...&Wang, Yi.(2015).Flexible nickel-doped zinc oxide thin-film transistors fabricated on plastic substrates at low temperature.JAPANESE JOURNAL OF APPLIED PHYSICS.
MLA	Huang, Lingling,et al."Flexible nickel-doped zinc oxide thin-film transistors fabricated on plastic substrates at low temperature".JAPANESE JOURNAL OF APPLIED PHYSICS (2015).