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	Development of 14 mems multifunction integrated optical device
	Chen, Qinghua ; Chen, Yingjun ; Li, Yanmei ; Wu, Wengang
	2013
英文摘要	A 1??4 compound-driven MEMS-based optical device with optical switch and variable optical power attenuating functions has been proposed to optimally serve multifunctional optical fiber-based networking applications. The device manipulates the light with binary-slope mirrors driven by compound electrostatic actuator. The optical model for switching is investigated. Performances of the fabricated devices assembled with ball-lensed fibers are measured and discussed. Measurements reveal that the insertion loss of the device is less than 2.6 dB and the controllable attenuation range is more than 40 dB for the switching and attenuation function, respectively. ? (2013) Trans Tech Publications, Switzerland.; EI; 0
语种	英语
DOI标识	10.4028/www.scientific.net/AMM.249-250.551
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/411978]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Chen, Qinghua,Chen, Yingjun,Li, Yanmei,et al. Development of 14 mems multifunction integrated optical device. 2013-01-01.

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