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	Verilog-A Modeling and Design of a Micromachined Capacitive Accelerometer
	Li Haojiong ; Zhang Mingming ; Chen Zhongjian ; Huang Jingqing ; Meng Xiangyun ; Lu Wengao ; Zhang Yacong ; Su Weiguo ; Li Song
	2011
关键词	Capacitive accelerometer Interface circuit Low noise Verilog-A model
英文摘要	In order to design accelerometers, electromechanical hybrid simulation with the sensor and interface circuit together is required. In this paper a Verilog-A model for the accelerometer sensor is presented, and based on the Verilog-A model presented, an open-loop capacitive accelerometer with a full-scale range of +/- 2g is presented. The Verilog-A model, characterizing the properties of the sensor, is compared to be right with the Matlab model published before. The accelerometer is tested to achieve the equivalent noise acceleration (ENA) about 7.7 mu g/root Hz.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000304037500153&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Physics, Applied; CPCI-S(ISTP); 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/406108]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Li Haojiong,Zhang Mingming,Chen Zhongjian,et al. Verilog-A Modeling and Design of a Micromachined Capacitive Accelerometer. 2011-01-01.

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