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	Fabrication of Large-Scale Suspended Graphene Clamp-Clamp Beam by FIB Cutting
	Zhang, Shibin ; Wan, Xia ; Xu, Yang ; Chen, Jing
	2013
关键词	graphene suspended FIB SGCCB graphene suspended FIB SGCCB STEM-CELLS DIFFERENTIATION RESONATORS SHEETS
英文摘要	In this study, suspended graphene clamp-clamp beam (SGCCB) as long as 100 pm was manufactured by FIB cutting. Large-scale graphene film was grown on Cu foil by CVD and transferred to DRIE defined silicon substrate. The influence of FIB cutting time and ion beam intensity on the pattern profile were investigated with an optimized processing recipe. The SGCCBs revealed a sharp edge, which can be used for gas molecule sensors, resonator and many other fields.; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1109/NANO.2013.6721019
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/405827]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, Shibin,Wan, Xia,Xu, Yang,et al. Fabrication of Large-Scale Suspended Graphene Clamp-Clamp Beam by FIB Cutting. 2013-01-01.

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