Patterning of visible/infrared dual-band microstrip filter arrays for   multispectral imaging application

doi:10.1088/0960-1317/19/8/085004

CORC > 北京大学 > 信息科学技术学院

	Patterning of visible/infrared dual-band microstrip filter arrays for multispectral imaging application
	Lai, Jian-Jun ; Liang, Hua-Feng ; Zhou, Zhi-Ping ; Fang, Guo-Jia ; Li, Li
刊名	journal of micromechanics and microengineering
	2009
关键词	LIFT-OFF PROCESS FABRICATION
DOI	10.1088/0960-1317/19/8/085004
英文摘要	Visible/infrared dual-band microstrip filter arrays have been developed to be integrated with 512 x 512 PtSi CCD imaging sensor chips for multispectral imaging when it operates in the front-illumination mode. A high visible transmittance and high infrared reflectance ZAO (ZnO:Al) based coating for visible passband and an interference absorbing filter film for a mid-infrared passband have been designed and deposited on sapphire substrates. An effective double-layer lift-off technique that is compatible with high temperature deposition has been developed to create thick microstrip infrared film. The infrared passband film using germanium and yttrium fluoride as high and low refractive indices materials have been deposited by ion-beam-assisted electron beam evaporation. Tested optical performance results reveal that the visible and near-infrared transmittance of the infrared passband film is very low, which makes it ideal for mid-infrared imaging. Environmental durability testing shows that the microstrip arrays have good mechanical and thermal performances for practical applications.; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics; SCI(E); EI; 2; ARTICLE; 8; 19
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/396841]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Lai, Jian-Jun,Liang, Hua-Feng,Zhou, Zhi-Ping,et al. Patterning of visible/infrared dual-band microstrip filter arrays for multispectral imaging application[J]. journal of micromechanics and microengineering,2009.
APA	Lai, Jian-Jun,Liang, Hua-Feng,Zhou, Zhi-Ping,Fang, Guo-Jia,&Li, Li.(2009).Patterning of visible/infrared dual-band microstrip filter arrays for multispectral imaging application.journal of micromechanics and microengineering.
MLA	Lai, Jian-Jun,et al."Patterning of visible/infrared dual-band microstrip filter arrays for multispectral imaging application".journal of micromechanics and microengineering (2009).