TiO2 micro-devices fabricated by laser direct writing

doi:10.1364/OE.19.017390

CORC > 北京大学 > 信息科学技术学院

	TiO2 micro-devices fabricated by laser direct writing
	Wang, Yongsheng ; Miao, Junjie ; Tian, Ye ; Guo, Chuanfei ; Zhang, Jianming ; Ren, Tianling ; Liu, Qian
刊名	光学快报
	2011
关键词	BEAM LITHOGRAPHY FILMS NANOSTRUCTURES TITANIUM ARRAYS
DOI	10.1364/OE.19.017390
英文摘要	Constructing micro/nanostructures based on TiO2 has attracted increasing attention due to the excellent properties of TiO2. In this study, we report a simple method to directly fabricate TiO2 micro-devices, including Fresnel lens, gear structures and suspended beams only by laser direct writing and selective-etching processing. This route shows great potential in fabricating TiO2 structures for micro-electro-mechanical systems, diffractive optical elements and bio-applications, owing to its maskless process, low cost, and flexible dry/wet alternative etching treatment. (C) 2011 Optical Society of America; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000294489700070&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Optics; SCI(E); EI; 6; ARTICLE; 18; 17390-17395; 19
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/394566]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang, Yongsheng,Miao, Junjie,Tian, Ye,et al. TiO2 micro-devices fabricated by laser direct writing[J]. 光学快报,2011.
APA	Wang, Yongsheng.,Miao, Junjie.,Tian, Ye.,Guo, Chuanfei.,Zhang, Jianming.,...&Liu, Qian.(2011).TiO2 micro-devices fabricated by laser direct writing.光学快报.
MLA	Wang, Yongsheng,et al."TiO2 micro-devices fabricated by laser direct writing".光学快报 (2011).