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Short-wave infrared, medium-wave infrared, and long-wave infrared imaging study for optical readout microcantilever array infrared sensing system
Gong, Cheng ; Zhao, Yuejin ; Dong, Liquan ; Hui, Mei ; Yu, Xiaomei ; Liu, Xiaohua
刊名光学工程
2013
关键词bimaterial microcantilever optical readout short-wave infrared imaging medium-wave infrared imaging long-wave infrared imaging DETECTOR
DOI10.1117/1.OE.52.2.026403
英文摘要We aim to study the short-wave infrared (SWIR), medium-wave infrared (MWIR), and long-wave infrared (LWIR) imaging ability based on optical readout bimaterial microcantilever focal plane array (FPA) uncooled infrared imaging system. First, the principle of the bimaterial microcantilever sensing and the fabrication of the microcantilever array are introduced. Second, the optical-thermal-mechanical sensing theories based on the FPA are given. Finally, an optical readout microcantilever FPA infrared imaging system is developed for SWIR, MWIR, and LWIR imaging experiments. The experimental results show that the system can acquire the clear images of the SWIR, MWIR, and LWIR targets. (C) The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI. [DOI: 10.1117/1.OE.52.2.026403]; Optics; SCI(E); 1; ARTICLE; 2; 52
语种英语
内容类型期刊论文
源URL[http://ir.pku.edu.cn/handle/20.500.11897/393613]  
专题信息科学技术学院
推荐引用方式
GB/T 7714
Gong, Cheng,Zhao, Yuejin,Dong, Liquan,et al. Short-wave infrared, medium-wave infrared, and long-wave infrared imaging study for optical readout microcantilever array infrared sensing system[J]. 光学工程,2013.
APA Gong, Cheng,Zhao, Yuejin,Dong, Liquan,Hui, Mei,Yu, Xiaomei,&Liu, Xiaohua.(2013).Short-wave infrared, medium-wave infrared, and long-wave infrared imaging study for optical readout microcantilever array infrared sensing system.光学工程.
MLA Gong, Cheng,et al."Short-wave infrared, medium-wave infrared, and long-wave infrared imaging study for optical readout microcantilever array infrared sensing system".光学工程 (2013).
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