Parameter Extraction of Nano-Scale MOSFET by a Forward Gated-Diode Method | |
Zhang, Chenfei ; Shi, Min ; Zhang, Zhenjuan ; Sun, Lin ; Wang, Qiang ; Ma, Chenyue ; Guo, Xinjie ; Zhang, Xiufang ; He, Jin ; Chen, Qin ; Ye, Yun ; Ma, Yong ; Wang, Ruonan ; Wang, Hao | |
刊名 | journal of computational and theoretical nanoscience
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2012 | |
关键词 | Forward Gated-Diode Method Recombination-Generation Current Parameter Extraction MOSFETs INTERFACE STATE GENERATION THRESHOLD VOLTAGE RELIABLE MODEL TRAPS |
DOI | 10.1166/jctn.2012.2248 |
英文摘要 | The forward gated-diode method is used in this paper to extract the dielectric oxide thickness and body doping concentration of nano-scale MOSFETs, especially when both of the variables are unknown previously. Firstly the dielectric oxide thickness and the body doping concentration as a function of forward gated-diode peak recombination-generation (R-G) current is derived from the device physics. And then the peak R-G current characteristics of the MOSFETs with different dielectric oxide thicknesses and body doping concentrations are simulated with ISE-Dessis for parameter extraction. The results from the simulation data demonstrate an excellent agreement with those extracted from the forward gated-diode method.; Chemistry, Multidisciplinary; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter; SCI(E); EI; 2; ARTICLE; 10; 1581-1585; 9 |
语种 | 英语 |
内容类型 | 期刊论文 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/392706] ![]() |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Zhang, Chenfei,Shi, Min,Zhang, Zhenjuan,et al. Parameter Extraction of Nano-Scale MOSFET by a Forward Gated-Diode Method[J]. journal of computational and theoretical nanoscience,2012. |
APA | Zhang, Chenfei.,Shi, Min.,Zhang, Zhenjuan.,Sun, Lin.,Wang, Qiang.,...&Wang, Hao.(2012).Parameter Extraction of Nano-Scale MOSFET by a Forward Gated-Diode Method.journal of computational and theoretical nanoscience. |
MLA | Zhang, Chenfei,et al."Parameter Extraction of Nano-Scale MOSFET by a Forward Gated-Diode Method".journal of computational and theoretical nanoscience (2012). |
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