Parameter Extraction of Nano-Scale MOSFET by a Forward Gated-Diode   Method

doi:10.1166/jctn.2012.2248

CORC > 北京大学 > 信息科学技术学院

	Parameter Extraction of Nano-Scale MOSFET by a Forward Gated-Diode Method
	Zhang, Chenfei ; Shi, Min ; Zhang, Zhenjuan ; Sun, Lin ; Wang, Qiang ; Ma, Chenyue ; Guo, Xinjie ; Zhang, Xiufang ; He, Jin ; Chen, Qin ; Ye, Yun ; Ma, Yong ; Wang, Ruonan ; Wang, Hao
刊名	journal of computational and theoretical nanoscience
	2012
关键词	Forward Gated-Diode Method Recombination-Generation Current Parameter Extraction MOSFETs INTERFACE STATE GENERATION THRESHOLD VOLTAGE RELIABLE MODEL TRAPS
DOI	10.1166/jctn.2012.2248
英文摘要	The forward gated-diode method is used in this paper to extract the dielectric oxide thickness and body doping concentration of nano-scale MOSFETs, especially when both of the variables are unknown previously. Firstly the dielectric oxide thickness and the body doping concentration as a function of forward gated-diode peak recombination-generation (R-G) current is derived from the device physics. And then the peak R-G current characteristics of the MOSFETs with different dielectric oxide thicknesses and body doping concentrations are simulated with ISE-Dessis for parameter extraction. The results from the simulation data demonstrate an excellent agreement with those extracted from the forward gated-diode method.; Chemistry, Multidisciplinary; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter; SCI(E); EI; 2; ARTICLE; 10; 1581-1585; 9
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/392706]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, Chenfei,Shi, Min,Zhang, Zhenjuan,et al. Parameter Extraction of Nano-Scale MOSFET by a Forward Gated-Diode Method[J]. journal of computational and theoretical nanoscience,2012.
APA	Zhang, Chenfei.,Shi, Min.,Zhang, Zhenjuan.,Sun, Lin.,Wang, Qiang.,...&Wang, Hao.(2012).Parameter Extraction of Nano-Scale MOSFET by a Forward Gated-Diode Method.journal of computational and theoretical nanoscience.
MLA	Zhang, Chenfei,et al."Parameter Extraction of Nano-Scale MOSFET by a Forward Gated-Diode Method".journal of computational and theoretical nanoscience (2012).