A LOW-NOISE HIGH-VOLTAGE INTERFACE CIRCUIT FOR CAPACITIVE MEMS GYROSCOPE

doi:10.1142/S0218126613400197

CORC > 北京大学 > 信息科学技术学院

	A LOW-NOISE HIGH-VOLTAGE INTERFACE CIRCUIT FOR CAPACITIVE MEMS GYROSCOPE
	Fang, Ran ; Lu, Wengao ; Wang, Guannan ; Tao, Tingting ; Zhang, Yacong ; Chen, Zhongjian ; Yu, Dunshan
刊名	journal of circuits systems and computers
	2013
关键词	Capacitive sensing circuit MEMS gyroscope high-voltage level shifter multiple power supplies
DOI	10.1142/S0218126613400197
英文摘要	This paper presents a high-voltage control and readout interface circuit implemented for capacitive Micro-Electro-Mechanic System (MEMS) gyroscope. A charge sensitive amplifier (CSA) with chopper technique is used to accomplish low-noise capacitive sensing. The stabilization of the closed drive loop is maintained by an auto gain controller (AGC) and an adjustable phase shifter. The outputs of the ASIC directly drive the gyroscope after buffered by an on-chip high-voltage level shifter. The chip is fabricated in a 0.35 um 5V/12V Bipolar, CMOS and DMOS (BCD) process. The test of the chip is performed with a MEMS vibratory gyroscope. The result shows that the Application Specific Integrated Circuit (ASIC) can ensure a stable oscillation in the drive axis, and the noise floor is 0.0015 degrees/s/root Hz within 100 Hz.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000327669200020&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Computer Science, Hardware & Architecture; Engineering, Electrical & Electronic; SCI(E); EI; 2; ARTICLE; 9,SI; 22
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/390984]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Fang, Ran,Lu, Wengao,Wang, Guannan,et al. A LOW-NOISE HIGH-VOLTAGE INTERFACE CIRCUIT FOR CAPACITIVE MEMS GYROSCOPE[J]. journal of circuits systems and computers,2013.
APA	Fang, Ran.,Lu, Wengao.,Wang, Guannan.,Tao, Tingting.,Zhang, Yacong.,...&Yu, Dunshan.(2013).A LOW-NOISE HIGH-VOLTAGE INTERFACE CIRCUIT FOR CAPACITIVE MEMS GYROSCOPE.journal of circuits systems and computers.
MLA	Fang, Ran,et al."A LOW-NOISE HIGH-VOLTAGE INTERFACE CIRCUIT FOR CAPACITIVE MEMS GYROSCOPE".journal of circuits systems and computers (2013).