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	Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in liquid environment
	Wang, J. ; Huang, Y. ; Wu, Wengang G. ; Hao, Y.L.
	2010
英文摘要	This paper reports a parylene-coated nMOSFET (n-type metal-oxide- semiconductor field-effect transistor)-embedded cantilever, which is suitable for the detection of chemical or biological molecules in liquid phase based on the surface stress sensing principle. The silicon cantilevers are configured along ?110? direction, and the channels of the embedded-nMOSFETs are perpendicular to the cantilevers. The fabrication process based upon POST-CMOS (complementary MOS) technology for making these devices on silicon-on-insulator (SOI) wafers is reported. The functionality of the sensor is preliminarily proven by the detection of 1-octanethiol in absolute ethanol. ?2010 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/NEMS.2010.5592202
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/329792]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang, J.,Huang, Y.,Wu, Wengang G.,et al. Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in liquid environment. 2010-01-01.

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