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	A low-noise interface circuit for MEMS vibratory gyroscope
	Fang, Ran ; Lu, Wengao ; Liu, Chang ; Chen, Zhongjian ; Ju, Yuan ; Wang, Guannan ; Ji, Lijiu ; Yu, Dunshan
	2010
英文摘要	A CMOS ASIC has been designed and implemented for readout and control of MEMS vibratory gyroscopes. A low noise design is achieved by using the technique of sinusoidal chopper stabilization with a chopping frequency of 2MHz, which will effectively suppress the low frequency noise. A closed loop control method in driving mode is presented. The Chip is fabricated in a 0.35??m standard CMOS process with an area of 2.5??2.5mm2. The test is performed with a vibratory gyroscope on the condition of closed-loop control, and the measurement result shows a detecting resolution of 6aF in 100Hz bandwidth from a single 5V supply. ?2010 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/ICSICT.2010.5667561
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/329606]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Fang, Ran,Lu, Wengao,Liu, Chang,et al. A low-noise interface circuit for MEMS vibratory gyroscope. 2010-01-01.

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