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	Integrated fuel cell micro power system by microfabrication technique
	Xiao, Zhiyong ; Yan, Guizhen ; Feng, Chunhua ; Chan, Philip C. H. ; Hsing, I.-Ming
	2005
英文摘要	In this paper, we report a silicon/glass based micro fuel cell system fabricated by the micromachining technique. The anode and cathode catalyst layers are formed by directly sputtering platinum on the ICP-etched (Inductively Coupled Plasma) high-aspect-ratio columns on silicon substrate. Integrated gold-based micro current collectors are patterned on the silicon and glass surfaces. This prototypical micro fuel cell fed by H2/O2 demonstrates an output power of 7.10 mw/cm2. An improved power of 12.3 mW/cm2 is achieved by a novel etching process. Both prototypes are also tested with methanol/O2, and the maximum output power is 0.10 mW/cm2 and 0.15 mW/cm2, respectively. Low internal resistance (around 0.7??·cm2) is achieved when using thin gold film (200 nm) as current collectors and the catalyst surface roughness does not affect the internal resistance. ? 2005 IEEE.; EI; 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/328939]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Xiao, Zhiyong,Yan, Guizhen,Feng, Chunhua,et al. Integrated fuel cell micro power system by microfabrication technique. 2005-01-01.

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