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	Optimization of nanoscale silicon waveguide fabrication
	Chen, Yao ; Feng, Junbo ; Zhou, Zhiping ; Yu, Jun ; Summers, Christopher J. ; Citrin, David S.
	2008
英文摘要	A simple and effective technique was developed to improve the nanoscale silicon waveguide fabrication. 40 nanometer features with smooth and vertical sidewall are demonstrated. With this technique, nanoscale silicon grating coupler was obtained. ?2008 Optical Society of America.; EI; 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/327613]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Chen, Yao,Feng, Junbo,Zhou, Zhiping,et al. Optimization of nanoscale silicon waveguide fabrication. 2008-01-01.

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