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	Symmetrical design and analysis of a novel MEMS-based 1x2 optical switch
	Wang, CS ; Cao, J ; Chang, S ; Fang, J ; Yang, ZC ; Zhang, DC
	2002
关键词	slope electrode optical switch micromachining SILICON ACTUATORS SYSTEMS
英文摘要	In this paper, a novel bulk micromachined 1x2 optical switch with optical fibre-holding structure is presented with the techniques of silicon-glass wafer bonding and deep reactive ion etch. The micromechanical optical switch includes two symmetrical slope anchors and a flexible beam with mirror, in which the beam is laterally driven by electrostatic actuator. It is important that the optimal design of this symmetrical slope anchor produces large displacement of the mirror with low driving voltage. The dynamic behavior of the switch is analyzed with Intellisuite by the coupling simulation of finite element and the boundary element, the switching time of the structure is also evaluated and the pull-in voltage is achieved by using a numerical iteration. Those optimization analyses offer a reasonable design for the optical switch based on the current fabrication technology.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000176903800039&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Multidisciplinary; Mathematics, Applied; Mechanics; Physics, Mathematical; SCI(E); CPCI-S(ISTP); 1
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/315770]
专题	信息科学技术学院 工学院
推荐引用方式 GB/T 7714	Wang, CS,Cao, J,Chang, S,et al. Symmetrical design and analysis of a novel MEMS-based 1x2 optical switch. 2002-01-01.

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