The electro-thermal response properties of miro pirani vacuum gauge | |
Zhang, Jinwen ; Wang, Long ; Wang, Xin ; Jiang, Wei | |
2010 | |
英文摘要 | In this paper, a micro vacuum pirani gauge made of single crystal silicon has been developed and its temperature and DC current response properties in different pressures were firstly studied detailedly. The resistance of it increases with the temperature exponentially. There is a current threshold resulting from the materials characteristics and the precision of the instrument at low pressure. And the DC current threshold increases with the pressure. Besides, Higher DC current and lower pressure will leads to longer temperature stabilized time. ?2010 IEEE.; EI; 0 |
语种 | 英语 |
DOI标识 | 10.1109/ICSICT.2010.5667555 |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/295468] |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Zhang, Jinwen,Wang, Long,Wang, Xin,et al. The electro-thermal response properties of miro pirani vacuum gauge. 2010-01-01. |
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