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	REACE: A new algorithm for low energy ion implantation simulation
	Shi, Xiaokang ; Yu, Min ; Shi, Hao ; Huang, Ru ; Zhang, Xing ; Wang, Yangyuan ; Zhang, Jinyu
	2003
英文摘要	A new method for the acceleration of MD (molecular dynamics) simulation of ion implantation into crystalline targets is presented, named REACH (Rare Event Algorithm with Cascade Effect). This method can speed up the MD simulation of ion implantation with cascade processes. As a result, the time required to perform a simulation with high precision and dose effect is drastically reduced. And many details producing statistical noise in the simulation are simulated in the REACE and help it to be more reasonable and reliable.; EI; 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/295368]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Shi, Xiaokang,Yu, Min,Shi, Hao,et al. REACE: A new algorithm for low energy ion implantation simulation. 2003-01-01.

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