A new simulation method of ion implantation | |
Shi, Xiaokang ; Yu, Min ; Ji, Huihui ; Huang, Ru ; Zhang, Xing ; Zhang, Jinyu | |
2004 | |
英文摘要 | Efficient simulations of ion implantation are very important to ultra shallow junction technology. In this paper, a new splitting method is developed, based on the quantitative description and sensitivity analysis of statistical noise. A series of formulas are deduced and some disadvantages of existing splitting methods are pointed out.; EI; 0 |
语种 | 英语 |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/295359] ![]() |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Shi, Xiaokang,Yu, Min,Ji, Huihui,et al. A new simulation method of ion implantation. 2004-01-01. |
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