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	A precise and efficient analytical method of realistic dopant fluctuations in shallow junction formation
	Shi, Xiaokang ; Min, Yu ; Yin, Jun ; Zhang, Guoyan ; Huang, Ru ; Zhang, Xing
	2004
英文摘要	The paper addresses a precise and efficient analytical method of realistic dopant fluctuations in shallow junction formation. To reach the analytical method, millions of simulations are finished, and data of simulation results are analyzed. The analytical function of the method is without any additional fitting parameters and can be used to calculate the standard deviation and normalized standard deviation at different depths of the sallow junctions. And some simulation results of characteristics variations of devices are also shown in this paper.; EI; 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/295358]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Shi, Xiaokang,Min, Yu,Yin, Jun,et al. A precise and efficient analytical method of realistic dopant fluctuations in shallow junction formation. 2004-01-01.

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