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	The use of second order system equation in the Micro Electro Mechanical System (MEMS) education
	Dong, Haifeng ; Zhang, Haixia ; Hao, Yilong
	2004
英文摘要	A major challenge in Micro Electro Mechanical System (MEMS) education, is dealing with the multi-disciplinary nature of the field, which may include solid mechanics, fluid mechanics, electronics etc. Instead of teaching these subjects independently, we link this multi-disciplinary knowledge domain by the second-order system equation. In addition, the related CAD software is introduced during the explanation of the second order system equation. This teaching method makes the student understand MEMS more quickly and systemically, and if needed, they can seek the related knowledge and study further on their own. Copyright ? 2004 by ASME.; EI; 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/295287]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Dong, Haifeng,Zhang, Haixia,Hao, Yilong. The use of second order system equation in the Micro Electro Mechanical System (MEMS) education. 2004-01-01.

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