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	Design of a novel low cross-axis sensitivity micro-gravity sandwich capacitance accelerometer
	Hu, Qifang ; Gao, Chengchen ; Zhang, Yangxi ; Cui, Jian ; Hao, Yilong
	2011
英文摘要	This paper presents a novel design of the highly symmetric beam-mass structure for out-of-plane differential capacitance accelerometer. In this design, the thick proof mass is mirror symmetrically suspended by eight L-shape beams form both top and bottom sides. By this approach, the sensing mode of the accelerometer is successfully decoupled from other variation modes without tradeoff between sensing capacitance and structure flexibility. Accelerometer adopting this structure achieves a differential capacitance sensitvity of 54.38pF/g. The capacitance instability is 0.95??g (30min) in normal pressure, and the close-loop sensitivity is1.01v/g. ? 2011 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/NEMS.2011.6017437
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/295192]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Hu, Qifang,Gao, Chengchen,Zhang, Yangxi,et al. Design of a novel low cross-axis sensitivity micro-gravity sandwich capacitance accelerometer. 2011-01-01.

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