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	The fabrication of 16*16 MEMS-based optical switch with accurate optical fiber grooves integration
	Chen, Qinghua ; Wu, Wengang ; Yan, Guizhen ; Hao, Yilong
	2007
英文摘要	In this paper, a novel surface and bulk hybrid micromachining process for fabricating a 16??16 electrostatically-actuated MEMS-based optical switch is introduced. The fabrication enhances the capabilities of rotation type of micromirrors by enlarging their rotation angle to 90 degrees, which will provide a wide variety of possible mechanical designs for many optical applications such as scanners and filters, especially those requiring large angular adjustment. Furthermore, monolithic integration of fiber grooves and micromirrors are achieved by utilizing accurate photolithography and etching techniques. The fabricated 2-??m-thick polysilicon mirrors are able to rotate inward by 90 degrees to a vertical position when the applied voltage reaches the pull-in value of 208 V. Under the shortest optical path in the 16??16 switch array, the average and worst-case measurement values of fiber-mirror-fiber insertion loss are 2.27 dB and 2.48 dB, respectively. A fatigue test turns out to show that the micromirrors and torsion beams are quite durable to endure more than 1.368??102 billion cycle-tilting movement. Copyright ? 2007 by ASME.; EI; 0
语种	英语
DOI标识	10.1115/MNC2007-21178
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/295129]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Chen, Qinghua,Wu, Wengang,Yan, Guizhen,et al. The fabrication of 16*16 MEMS-based optical switch with accurate optical fiber grooves integration. 2007-01-01.

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