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	High Q circular-section solenoid-type inductor
	Li, Xiuhan ; Shu, Guanghua ; Sao, Jinan ; Zhang, Xongwei
	2008
英文摘要	A* high Q-factor circular-section solenoid-type inductor is designed and fabricated through micro electro mechanical system (MEMS) technology. The radius of the circular-section is 100??m. Ansoft HFSS is used to design and optimize the structure parameters of the inductor. The stable inductance of 10nH and maximum Q-factor of 46 is gained at the N of 10, wire width w of 10??m, sp ace between wires d of 15??m and the self-resonance frequency of the inductor is above 10GHz. A novel fabrication method - flip chip bonding is proposed to bond the two parts of the inductor, and the process is compatible with CMOS process. Copyright ? 2008 by ASME.; EI; 0
语种	英语
DOI标识	10.1115/MicroNano2008-70139
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/294911]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Li, Xiuhan,Shu, Guanghua,Sao, Jinan,et al. High Q circular-section solenoid-type inductor. 2008-01-01.

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