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	Design and simulation of a 2-axis low g acceleration switch with multi-folded beams
	Lin, Luxing ; Zhao, Qiancheng ; Yang, Zhenchuan ; Zhang, Dacheng ; Yan, Guizhen
	2014
英文摘要	A 2-axis low G acceleration threshold switch with multi-folded beams and buffering springs is presented in this paper. The multi-folded beams at four corners which anchored on the substrate permit the proof-mass move in both X and Y axis. The buffering springs contact the proof-mass and one electrode aiming at extending the contact time when the switch is latched while protecting the switch against severe shock damage from intensive impact of the switch. The threshold acceleration of the switch is designed as 60G and will be fabricated by a two-mask silicon-on-glass process. ? 2014 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/ICSICT.2014.7021682
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/294859]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Lin, Luxing,Zhao, Qiancheng,Yang, Zhenchuan,et al. Design and simulation of a 2-axis low g acceleration switch with multi-folded beams. 2014-01-01.

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