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	Fabrication of monolithic integrated MEMS resonator with wet-release-monitoring array
	Zhao, Danqi ; He, Jun ; Huang, Xian ; Zhang, Li ; Yang, Fang ; Zhang, Dacheng
	2013
英文摘要	In this work, a monolithic integrated MEMS resonator was fabricated and tested. Surface micromachining method was employed to fabricate the cantilever MEMS resonator after a standard 3 ??m CMOS process. The wet release method with dilute HF solution was chosen and compared to the anhydrous HF vapor release process. A release-monitoring structure with polysilicon/Au cantilever array was used to determine the corrosion time of the sacrificial material. Results showed that the MOSFETs function well after proposed release process. ? 2013 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/EDSSC.2013.6628207
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/294365]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhao, Danqi,He, Jun,Huang, Xian,et al. Fabrication of monolithic integrated MEMS resonator with wet-release-monitoring array. 2013-01-01.

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