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	Double tuning-fork resonant accelerometer
	Jia, YB ; Hao, YL ; Zhang, R
	2004
关键词	MEMS accelerometer resonant bulk-silicon process frequency shift
英文摘要	The structure of a novel resonant accelerometer is designed and fabricated in this paper, which includes two double-ended tuning forks (DETF), a proof mass surrounding two tuning forks and extending around, four-leverage system amplifying inertial force, and drive /sense combs. Each tuning fork is electrostatically actuated and sensed at resonance using comb electrodes. When an external acceleration is applied to the device, one tuning fork is subjected to a tensile force which raises its natural frequency, and the other tuning fork experiences a compressive force, lowering its frequency. The output of the accelerometer is the frequency difference between the two tuning forks. The device has been fabricated using MEMS bulk -silicon technology, whose sensitive degree of the accelerometer sample is 27.3 Hz/g, the resolution is 167.8 mu g.; Engineering, Electrical & Electronic; Materials Science, Multidisciplinary; Physics, Condensed Matter; CPCI-S(ISTP); 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/293772]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Jia, YB,Hao, YL,Zhang, R. Double tuning-fork resonant accelerometer. 2004-01-01.

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