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	Fabrication of SiC MEMS Pressure Sensor Based on Novel Vacuum-Sealed Method
	Wang, Chao ; Geng, Xiaobao ; Zhang, Haixia
	2008
关键词	POLYIMIDE
英文摘要	Fabrication of SiC MEMS pressure sensor based on novel vacuum-scaled method is presented in this paper. The sensor was fabricated using surface micromachining. Due to its excellent mechanical properties and high chemical resistance, PECVD (Plasma Enhanced Chemical Vapor Deposition) SiC was chosen as structural material. Polyimide acts as sacrificial layer which solve stiction problem in process. STS PECVD system is utilized to realize releasing, deposition and vacuum sealing consecutively in the process chamber, by this method wafer cleaning step was avoided before releasing the sacrificial layer, therefore, stiction problem is prevented. This fabrication technology can achieve high yield and low cost.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000262479800116&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Engineering, Mechanical; Nanoscience & Nanotechnology; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1115/MicroNano2008-70136
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/293694]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang, Chao,Geng, Xiaobao,Zhang, Haixia. Fabrication of SiC MEMS Pressure Sensor Based on Novel Vacuum-Sealed Method. 2008-01-01.

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