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	Research on Micro/Nano film getters for vacuum maintenance of MEMS - art. no. 60320B
	Jin, YF ; Zhao, Y
	2006
关键词	nano film advanced getter MEMS vacuum maintenance
英文摘要	Vacuum packaging is very important for sonic micro-electro-mechanical systems (MEMS) devices to perforin their basic functions properly and to enhance their reliability by keeping these devices away from harmful external environment. In order to maintain high vacuum in a cavity of MEMS devices, residual gases and leaking gases must be eliminated by getter materials embedded. This paper will report the fabrication and characterization of advanced getter, or micro/nano getters for MEMS applications.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000235333300011&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Engineering, Mechanical; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1117/12.667858
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/293545]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Jin, YF,Zhao, Y. Research on Micro/Nano film getters for vacuum maintenance of MEMS - art. no. 60320B. 2006-01-01.

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