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	Development of Infrared FPA Using Bimaterial Microcantilever Arrays
	JIn, Yufeng ; Yu, Xiaomei ; Zheng, Yongjun ; Zhao, Yuejin ; Liu, Xiaohua ; Dong, Liquan
	2011
关键词	FPA bimaterial microcantilever NETD time constant
英文摘要	An optical-readout bimaterial microcantilever-type infrared detector improving both IR absorption and pixel uniformity is proposed. A Focal Plane Array (FPA) of 128x128 pixels was fabricated using 4-inch silicon Micro-Electro Mechanical System (MEMS) processes. The FPA design and process development are discussed and the Scanning Electron Microscope (SEM) photos and imaging results of the FPA are presented. The Noise Equivalent Temperature Difference (NETD) of the proposed device was measured to be 200mK by a gray level change method and the time constant was calculated to be similar to 15 ms under a 10 mTorr pressure.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000297572400002&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Instruments & Instrumentation; Optics; Imaging Science & Photographic Technology; EI; CPCI-S(ISTP); 1
语种	英语
DOI标识	10.1117/12.898604
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/293160]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	JIn, Yufeng,Yu, Xiaomei,Zheng, Yongjun,et al. Development of Infrared FPA Using Bimaterial Microcantilever Arrays. 2011-01-01.

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