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	An experimental study on the side-opening filling process at the interface between microchannels with different widths
	Xie, Fei ; Wang, Yunshan ; Wang, Wei ; Wu, Wengang ; Li, Zhihong ; Yossifon, Gilad ; Chang, Hsueh-Chia
	2011
关键词	Micro/nanochannel Side-opening filling Filling factor STEP COVERAGE
英文摘要	Miero/nanochannel is of great importance due to its wide applications in micro total analysis system. In a given micro/nanofluidic device, the nanochannel and microchannel can works as function provider and reagent delivering passage, respectively. The easiest way to fabricate micro/nanochannel is depositing material onto a predefined microchannel until nanometer-sized pattern is obtained. Although the deposition process inside the microchannel has been studied before, the filling performance at the side-opening, the connection between microchannels with different widths, is limited studied. The different filling performance at side-opening will lead to a distinct geometrical size. In this work, side-opening filling process during a low pressure chemical vapor deposition of silicon dioxide onto pre-etched microchannels with patterns of straight, triangle and rhombus shapes was preliminarily studied. A filling factor was defined to describe the side-opening filling performance. The present results indicated that the side-opening filling will be affected by the side-opening width, the depth of the microchannel and the microchannel shape.; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.4028/www.scientific.net/KEM.483.293
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/292892]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Xie, Fei,Wang, Yunshan,Wang, Wei,et al. An experimental study on the side-opening filling process at the interface between microchannels with different widths. 2011-01-01.

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