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	Analysis and Improvement of a 3 Axis Accelerometer
	Wang Shitao ; Jia Yubin ; Zhang Binzhen ; Liu Xuesong ; Huang Qinwen ; Hao Yilong
	2012
关键词	3-axis accelerometer out-of-plane movement mechanical coupling cross talk DECOUPLED OSCILLATION MODES MICROMACHINED GYROSCOPE
英文摘要	In this paper, an integrated 3-axis MEMS accelerometer was analyzed. Because of asymmetrical structure, z-axis sensing element, which was imbedded in the proof mass of lateral accelerometers, had large mechanical coupling. Simulation result showed that the cross talk in z-axis was as high as 64.3%. To solve the problem, a fully symmetrical structure with vertical springs was adopted in z-axis sensing element. The movement of z-axis was linear vertical displacement instead of torsional displacement. Simulation results showed there was no obvious cross talk in z-axis sensing element.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000309369400030&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.4028/www.scientific.net/KEM.503.163
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/292863]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang Shitao,Jia Yubin,Zhang Binzhen,et al. Analysis and Improvement of a 3 Axis Accelerometer. 2012-01-01.

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