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	Al-doped ZnO Thin-Film Transistors on Flexible Plastic Substrate
	Wang, Wei ; Han, Dedong ; Cai, Jian ; Geng, Youfeng ; Wang, Liangliang ; Ren, Yicheng ; Deng, Hao ; Wang, Yi ; Zhang, Shengdong
	2012
关键词	ATOMIC LAYER DEPOSITION
英文摘要	We have fabricated Al-doped ZnO thin-film transistors (AZO TFT) on plastic substrate at room temperature. The effect of O-2/Ar ratio during channel deposition is investigated on the electrical properties of the Al-doped ZnO thin-film transistors (TFTs) on plastic substrates at room temperature. As the O-2/Ar ratio increases, the threshold voltage increases monotonously while the saturation mobility and the subthreshold swing show a non-monotonic change, reaching a maximum and a minimum respectively when the ratio of O-2 is 5%. And it's further demonstrated that TFTs with as-deposited AZO films (5%O-2) exhibit the best electrical properties, with an on/off current ratio of 10(6), an off current in the order of 10(-11)A, a threshold voltage about 1.06 V, a subthreshold swing of about 0.76 V/dec, and a saturation mobility of about 47.76 cm(2)V(-1)s(-1). Compared to the AZO film with 100% Ar during the radio-frequency (RF) sputtering deposition, the grain size of AZO films abruptly decreases to a few nanometers as O-2 is added(5% O-2), and then becomes almost unchanged with the further increase of pO(2) (10% O-2 and 20% O-2). The resistivity experiences a substantial increase correspondingly. The results show that Al-doped ZnO is a promising candidate for the channel material of high performance flexible TFTs.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000326894500045&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Materials Science, Coatings & Films; Physics, Applied; EI; CPCI-S(ISTP); 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/292677]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang, Wei,Han, Dedong,Cai, Jian,et al. Al-doped ZnO Thin-Film Transistors on Flexible Plastic Substrate. 2012-01-01.

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