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	A microactuator for magnetic field control device with large shifting range
	Liu, Kun ; Cao, Yitong ; Yu, Huaiqiang ; Li, Zhihong
	2013
关键词	microactuator low power consumption electrostatic driven ACTUATORS MIRROR
英文摘要	A large tilting angle and zero static power consumption microactuator has been designed and fabricated in order to meet the requirement of low power consumption and remotely control systems. Analytical model and fabrication process flow of rotation actuator have been demonstrated, and static performance has been tested and compared to theoretical data. The results show the performance of our electrostatic driven device in good agreement with theoretical predicted model.; Engineering, Biomedical; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1109/NEMS.2013.6559785
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/292566]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Liu, Kun,Cao, Yitong,Yu, Huaiqiang,et al. A microactuator for magnetic field control device with large shifting range. 2013-01-01.

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