Monolithic integration of micromachined sensors and CMOS circuits based   on SOI technologies

doi:10.1088/0960-1317/18/3/037002

CORC > 北京大学 > 信息科学技术学院

	Monolithic integration of micromachined sensors and CMOS circuits based on SOI technologies
	Yu, Xiaomei ; Tang, Yaquan ; Zhang, Haitao
刊名	journal of micromechanics and microengineering
	2008
关键词	CANTILEVERS
DOI	10.1088/0960-1317/18/3/037002
英文摘要	This note presents a novel way to monolithically integrate micro-cantilever sensors and signal conditioning circuits by combining SOI CMOS and SOI micromachining technologies. In order to improve the sensor performance and reduce the system volume, an integrated sensor system composed of a piezoresistive cantilever array, a temperature-compensation current reference, a digitally controlled multiplexer and an instrument amplifier is designed and finally fabricated. A post-SOI CMOS process is developed to realize the integrated sensor system which is based on a standard CMOS process with one more mask to define the cantilever structure at the end of the process. Measurements on the finished SOI CMOS devices and circuits show that the integration process has good compatibility both for the cantilever sensors and for the CMOS circuits, and the SOI CMOS integration process can decrease about 25% sequences compared with the bulk silicon CMOS process.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000254151600046&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics; SCI(E); EI; 3; ARTICLE; 3; 18
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/292091]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yu, Xiaomei,Tang, Yaquan,Zhang, Haitao. Monolithic integration of micromachined sensors and CMOS circuits based on SOI technologies[J]. journal of micromechanics and microengineering,2008.
APA	Yu, Xiaomei,Tang, Yaquan,&Zhang, Haitao.(2008).Monolithic integration of micromachined sensors and CMOS circuits based on SOI technologies.journal of micromechanics and microengineering.
MLA	Yu, Xiaomei,et al."Monolithic integration of micromachined sensors and CMOS circuits based on SOI technologies".journal of micromechanics and microengineering (2008).