Design and fabrication of a high sensitivity focal plane array for   uncooled IR imaging

doi:10.1088/0960-1317/18/5/057001

CORC > 北京大学 > 信息科学技术学院

	Design and fabrication of a high sensitivity focal plane array for uncooled IR imaging
	Yu, Xiaomei ; Yi, Yuliang ; Ma, Shenglin ; Liu, Ming ; Liu, Xiaohua ; Dong, Liquan ; Zhao, Yuejin
刊名	journal of micromechanics and microengineering
	2008
关键词	INFRARED DETECTOR PERFORMANCE
DOI	10.1088/0960-1317/18/5/057001
英文摘要	This note reports on the development of a novel cantilever-based focal plane array (FPA) for uncooled infrared (IR) imaging. The FPA of 160 x 120 pixels consisted of a 1 mu m thick low stress SiN(x) structure layer, a thin gold reflection layer and a thick gold bimaterial layer. A bulk silicon process that includes silicon-glass anodic bonding and deep reactive ion etching techniques was developed selectively to remove the substrate silicon and form silicon frames for every FPA pixel. The thermomechanical sensitivity of the cantilever pixel was measured as 0.11 mu m K(-1), the noise-equivalent temperature difference of the FPA was theoretically estimated to be below 60 mK and the response time was calculated to be 15 ms. An optical readout system was used to measure deflections of all cantilevers in the FPA simultaneously, and thermal images of the human body were captured in good time. One of the unique advantages of this honeycomb-like FPA is the selective removal of the silicon substrate, which could increase the IR absorption efficiency by 48% compared with that fabricated by a traditional surface sacrificial layer process.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000255659600035&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics; SCI(E); EI; 15; ARTICLE; 5; 18
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/292059]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yu, Xiaomei,Yi, Yuliang,Ma, Shenglin,et al. Design and fabrication of a high sensitivity focal plane array for uncooled IR imaging[J]. journal of micromechanics and microengineering,2008.
APA	Yu, Xiaomei.,Yi, Yuliang.,Ma, Shenglin.,Liu, Ming.,Liu, Xiaohua.,...&Zhao, Yuejin.(2008).Design and fabrication of a high sensitivity focal plane array for uncooled IR imaging.journal of micromechanics and microengineering.
MLA	Yu, Xiaomei,et al."Design and fabrication of a high sensitivity focal plane array for uncooled IR imaging".journal of micromechanics and microengineering (2008).