A lateral-axis micromachined tuning fork gyroscope with torsional   Z-sensing and electrostatic force-balanced driving

doi:10.1088/0960-1317/20/2/025007

CORC > 北京大学 > 信息科学技术学院

	A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving
	Guo, Z. Y. ; Yang, Z. C. ; Zhao, Q. C. ; Lin, L. T. ; Ding, H. T. ; Liu, X. S. ; Cui, J. ; Xie, H. ; Yan, G. Z.
刊名	journal of micromechanics and microengineering
	2010
关键词	DECOUPLED OSCILLATION MODES
DOI	10.1088/0960-1317/20/2/025007
英文摘要	A single-crystal silicon-based lateral-axis tuning-fork gyroscope (TFG) with electrostatic force-balanced (EFB) driving and torsional z-sensing is presented. The EFB comb drive used in this TFG can efficiently suppress the mechanical coupling in a simple manner. The TFG structure is also optimized to further reduce the coupling. Moreover, the Coriolis acceleration-induced out-of-plane rotation of the sensing mode is detected by using bending springs and differential comb fingers. This z-sensing design has relatively high Q, so this gyroscope can work at atmospheric pressure. This TFG design has been fabricated and tested. Measured in air, the device demonstrates a sensitivity of 2.9 mV/degrees/s, a full range of 800 degrees s(-1) with a 0.9% nonlinearity and the noise floor of 0.035 degrees/s/Hz(1/2). This TFG design also has very low coupling, where the measured drive-to-sense coupling and sense-to-drive coupling are -45 dB and -51 dB, respectively.; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics; SCI(E); EI; 9; ARTICLE; 2; 20
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/292000]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Guo, Z. Y.,Yang, Z. C.,Zhao, Q. C.,et al. A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving[J]. journal of micromechanics and microengineering,2010.
APA	Guo, Z. Y..,Yang, Z. C..,Zhao, Q. C..,Lin, L. T..,Ding, H. T..,...&Yan, G. Z..(2010).A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving.journal of micromechanics and microengineering.
MLA	Guo, Z. Y.,et al."A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving".journal of micromechanics and microengineering (2010).