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	Integrated 3-D simulation tool for micro and nano fabrication
	Sun, Guangyi ; Zhao, Xin ; Lu, Guizhang ; Zhang, Haixia
	2008
英文摘要	This paper introduces an integrated 3-D simulation and visualization environment for Micro/Nano fabrication processes. From the nanostructures in several hundred nanometers to micro devices, most available fabrication processes, e.g., lithography, dry/wet etching, CVD/EVD, have been modeled and can be simulated seamlessly with each other under the uniform voxel-based representation method and standardized layout file. Also, physical-based and sophisticated-based simulations have been implemented together as well. High quality simulation and visualization algorithm enhance the reliability. ? 2008 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/NANO.2008.128
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/263405]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Sun, Guangyi,Zhao, Xin,Lu, Guizhang,et al. Integrated 3-D simulation tool for micro and nano fabrication. 2008-01-01.

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